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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Published by: College Park, MD, American Vacuum Society (United States of America) Subject: Physics Language: English Published: 2012- ISSN: 2166-2746, 2166-2754 Available at 1 Universities. | |||
Journal of Vacuum Science and Technology B. Microelectronics and Nanometer Structures Published by: College Park, MD, American Vacuum Society (United States of America) Subject: Physics Language: English Published: 2006-2012 ISSN: 1071-1023, 1520-8567 Available at 6 Universities. |